Academic Keynote: In-situ Monitoring of mechanical properties of thin films at High Temperature

Activity: Talk or presentation types › Invited talk

Description

The semiconductor industry has advanced through nanoscale material characterization, relying on ex-situ tools like SEM, TEM, and AFM. However, in-situ characterization during high-temperature processes, such as graphene growth at 1200 K, remains a challenge. Current methods often involve manual transfer, risking contamination and altering material properties. In this talk, I will discuss our group's research on using micro-machined oscillators, including double paddle and planar frame designs manufactured using polymer glass suspension, for in-situ mass and elasticity monitoring of thin films.
Period13 Dec 2024
Event titleNPL: Semiconductor Round table
Event typeWorkshop
LocationBelfast, United KingdomShow on map
Degree of RecognitionNational

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