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In-situ Mass and Elasticity Monitoring Sensors (iMEMS) for Characterization of Thin Films at High Temperature
Shakeel, Hamza
(PI)
School of Electronics, Electrical Engineering and Computer Science
Institute of Electronics, Communications & Information Technology
Material and Advanced Technologies for Healthcare
Overview
Fingerprint
Research output
(7)
Activities
(1)
Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Weight
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Material Science
Silicon Dioxide
100%
Resonator
91%
Glass
40%
Wet Etching
25%
Devices
23%
Oscillator
16%
Low Pressure Chemical Vapor Deposition
16%
Microfabrication
16%
Surface Roughness
11%
Three Dimensional Printing
10%
Lithography
8%
Thermal Expansion
8%
Materials Property
8%
Chromium
6%
Engineering
Fused Silica
50%
Resonator
33%
Fused Silica
33%
Gas Fuel Manufacture
20%
Silica Glass
20%
Resonance Mode
19%
Fabrication
16%
Silica Glass
16%
Cylindrical Shell
16%
Fabrication Method
14%
Q Factor
9%
Cleanroom
8%
Processing Step
8%
Thermal Processing
8%
Shell Thickness
8%
Mm Diameter
7%
Device Performance
7%
Quality Factor
6%
Casting
6%