A COMPARISON OF EXPERIMENTAL AND THEORETICAL ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN A MULTICUSP ION-SOURCE

J. Bretagne, Bill Graham, M.B. Hopkins

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Experimental and theoretical electron energy distribution functions (EEDFS) measured in and calculated for the driver of a multicusp ion source operating in hydrogen are compared. The results show that atomic physics based theoretical models can accurately predict the EEDF in such discharges if some appropriate experimentally determined quantities are used as input parameters. The magnitude and shape of the EEDF is found to be particularly sensitive to the effective surface area to volume ratio for electrons.
Original languageEnglish
Pages (from-to)668-671
Number of pages4
JournalJournal Of Physics D-applied Physics
Volume24
Publication statusPublished - 1991

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