A Dynamic Sampling Methodology for Plasma Etch Processes

Bahman Honari, Seán McLoone

Research output: Contribution to conferencePoster

Original languageEnglish
Publication statusPublished - 2012
EventThe European Advanced Process Control and Manufacturing (APCM) Conference - Grenoble, France
Duration: 16 Apr 201219 Apr 2012

Conference

ConferenceThe European Advanced Process Control and Manufacturing (APCM) Conference
CountryFrance
CityGrenoble
Period16/04/201219/04/2012

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