A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation

Gian Antonio Susto*, Andrea Schirru, Simone Pampuri, Daniele Pagano, Sean McLoone, Alessandro Beghi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

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Engineering & Materials Science