A rapid thermal processing system for the deposition of silicon carbide layers on silicon

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	166-177
Number of pages	12
Journal	International Journal of Materials & Product Technology
Volume	11(1-2)
Publication status	Published - 1996

Cite this

@article{358747b1e484498ca3e45423f5e375e5,

title = "A rapid thermal processing system for the deposition of silicon carbide layers on silicon",

author = "John Montgomery and Fred Ruddell and David McNeill and Mervyn Armstrong and Harold Gamble",

year = "1996",

language = "English",

volume = "11(1-2)",

pages = "166--177",

journal = "International Journal of Materials & Product Technology",

}

TY - JOUR

T1 - A rapid thermal processing system for the deposition of silicon carbide layers on silicon

AU - Montgomery, John

AU - Ruddell, Fred

AU - McNeill, David

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 1996

Y1 - 1996

M3 - Article

VL - 11(1-2)

SP - 166

EP - 177

JO - International Journal of Materials & Product Technology

JF - International Journal of Materials & Product Technology

ER -