Language | English |
---|---|
Pages | 166-177 |
Number of pages | 12 |
Journal | International Journal of Materials & Product Technology |
Volume | 11(1-2) |
Publication status | Published - 1996 |
Cite this
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A rapid thermal processing system for the deposition of silicon carbide layers on silicon. / Montgomery, John; Ruddell, Fred; McNeill, David; Armstrong, Mervyn; Gamble, Harold.
In: International Journal of Materials & Product Technology, Vol. 11(1-2), 1996, p. 166-177.Research output: Contribution to journal › Article
TY - JOUR
T1 - A rapid thermal processing system for the deposition of silicon carbide layers on silicon
AU - Montgomery, John
AU - Ruddell, Fred
AU - McNeill, David
AU - Armstrong, Mervyn
AU - Gamble, Harold
PY - 1996
Y1 - 1996
M3 - Article
VL - 11(1-2)
SP - 166
EP - 177
JO - International Journal of Materials & Product Technology
T2 - International Journal of Materials & Product Technology
JF - International Journal of Materials & Product Technology
ER -