A rapid thermal processing system for the deposition of silicon carbide layers on silicon

John Montgomery, Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to journalArticle

LanguageEnglish
Pages166-177
Number of pages12
JournalInternational Journal of Materials & Product Technology
Volume11(1-2)
Publication statusPublished - 1996

Cite this

@article{358747b1e484498ca3e45423f5e375e5,
title = "A rapid thermal processing system for the deposition of silicon carbide layers on silicon",
author = "John Montgomery and Fred Ruddell and David McNeill and Mervyn Armstrong and Harold Gamble",
year = "1996",
language = "English",
volume = "11(1-2)",
pages = "166--177",
journal = "International Journal of Materials & Product Technology",

}

TY - JOUR

T1 - A rapid thermal processing system for the deposition of silicon carbide layers on silicon

AU - Montgomery, John

AU - Ruddell, Fred

AU - McNeill, David

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 1996

Y1 - 1996

M3 - Article

VL - 11(1-2)

SP - 166

EP - 177

JO - International Journal of Materials & Product Technology

T2 - International Journal of Materials & Product Technology

JF - International Journal of Materials & Product Technology

ER -