A rapid thermal processing system for the deposition of silicon carbide layers on silicon

John Montgomery, Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)166-177
Number of pages12
JournalInternational Journal of Materials & Product Technology
Volume11(1-2)
Publication statusPublished - 1996

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