| Language | English |
|---|---|
| Pages | 166-177 |
| Number of pages | 12 |
| Journal | International Journal of Materials & Product Technology |
| Volume | 11(1-2) |
| Publication status | Published - 1996 |
Cite this
Montgomery, J., Ruddell, F., McNeill, D., Armstrong, M., & Gamble, H. (1996). A rapid thermal processing system for the deposition of silicon carbide layers on silicon. International Journal of Materials & Product Technology, 11(1-2), 166-177.
@article{358747b1e484498ca3e45423f5e375e5,
title = "A rapid thermal processing system for the deposition of silicon carbide layers on silicon",
author = "John Montgomery and Fred Ruddell and David McNeill and Mervyn Armstrong and Harold Gamble",
year = "1996",
language = "English",
volume = "11(1-2)",
pages = "166--177",
journal = "International Journal of Materials & Product Technology",
}
Montgomery, J, Ruddell, F, McNeill, D, Armstrong, M & Gamble, H 1996, 'A rapid thermal processing system for the deposition of silicon carbide layers on silicon', International Journal of Materials & Product Technology, vol. 11(1-2), pp. 166-177.
A rapid thermal processing system for the deposition of silicon carbide layers on silicon. / Montgomery, John; Ruddell, Fred; McNeill, David; Armstrong, Mervyn; Gamble, Harold.
In: International Journal of Materials & Product Technology, Vol. 11(1-2), 1996, p. 166-177.Research output: Contribution to journal › Article
TY - JOUR
T1 - A rapid thermal processing system for the deposition of silicon carbide layers on silicon
AU - Montgomery, John
AU - Ruddell, Fred
AU - McNeill, David
AU - Armstrong, Mervyn
AU - Gamble, Harold
PY - 1996
Y1 - 1996
M3 - Article
VL - 11(1-2)
SP - 166
EP - 177
JO - International Journal of Materials & Product Technology
T2 - International Journal of Materials & Product Technology
JF - International Journal of Materials & Product Technology
ER -
Montgomery J, Ruddell F, McNeill D, Armstrong M, Gamble H. A rapid thermal processing system for the deposition of silicon carbide layers on silicon. International Journal of Materials & Product Technology. 1996;11(1-2):166-177.