Original language | English |
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Pages (from-to) | 166-177 |
Number of pages | 12 |
Journal | International Journal of Materials & Product Technology |
Volume | 11(1-2) |
Publication status | Published - 1996 |
A rapid thermal processing system for the deposition of silicon carbide layers on silicon
John Montgomery, Fred Ruddell, David McNeill, Mervyn Armstrong, Harold Gamble
Research output: Contribution to journal › Article › peer-review