A Simple Technology for Superjunction Device Fabrication: Polyflanked VDMOSFET

K.P. Gan, Xin Yang, Yung C. Liang, Ganesh S. Samudra, Liu Yong

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)
Original languageEnglish
Pages (from-to)627-629
Number of pages3
JournalIEEE Electron Device Letters
Volume23
Issue number10
Publication statusPublished - Oct 2002

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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