Absolute atomic oxygen density profiles in the discharge core of a microscale atmospheric pressure plasma jet

N. Knake, Kari Niemi, S. Reuter, V. Schulz-von Der Gathen, J. Winter

Research output: Contribution to journalArticle

78 Citations (Scopus)

Abstract

The micro atmospheric pressure plasma jet is an rf driven (13.56 MHz, ~20 W) capacitively coupled discharge producing a homogeneous plasma at ambient pressure when fed with a gas flow of helium (1.4 slm) containing small admixtures of oxygen (~0.5%). The design provides excellent optical access to the plasma core. Ground state atomic oxygen densities up to 3x1016 cm-3 are measured spatially resolved in the discharge core by absolutely calibrated two-photon absorption laser-induced fluorescence spectroscopy. The atomic oxygen density builds up over the first 8 mm of the discharge channel before saturating at a maximum level. The absolute value increases linearly with applied power.
Original languageEnglish
Article number131503
Pages (from-to)131503-131503
Number of pages1
JournalApplied Physics Letters
Volume93
Issue number13
DOIs
Publication statusPublished - Oct 2008

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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