Abstract
The micro atmospheric pressure plasma jet is an rf driven (13.56 MHz, ~20 W) capacitively coupled discharge producing a homogeneous plasma at ambient pressure when fed with a gas flow of helium (1.4 slm) containing small admixtures of oxygen (~0.5%). The design provides excellent optical access to the plasma core. Ground state atomic oxygen densities up to 3x1016 cm-3 are measured spatially resolved in the discharge core by absolutely calibrated two-photon absorption laser-induced fluorescence spectroscopy. The atomic oxygen density builds up over the first 8 mm of the discharge channel before saturating at a maximum level. The absolute value increases linearly with applied power.
Original language | English |
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Article number | 131503 |
Pages (from-to) | 131503-131503 |
Number of pages | 1 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 13 |
DOIs | |
Publication status | Published - Oct 2008 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)