Absolute photoionization cross sections for Xe4+, Xe5+, and Xe6+ near 13.5 nm: Experiment and theory

A. Aguilar, J.D. Gillaspy, G. F. Gribakin, R.A. Phaneuf, M.F. Gharaibeh, M.G. Kozlov, J.D. Bozek, A.L.D. Kilcoyne

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

Absolute photoionization cross-section measurements for a mixture of ground and metastable states of Xe4+, Xe5+, and Xe6+ are reported in the photon energy range of 4d -> nf transitions, which occur within or adjacent to the 13.5 nm window for extreme ultraviolet lithography light source development. The reported values allow the quantification of opacity effects in xenon plasmas due to these 4d -> nf autoionizing states. The oscillator strengths for the 4d -> 4f and 4d -> 5f transitions in Xeq+ (q=1-6) ions are calculated using nonrelativistic Hartree-Fock and random phase approximations. These are compared with published experimental values for Xe+ to Xe3+ and with the values obtained from the present experimental cross-section measurements for Xe4+ to Xe6+. The calculations assisted in the determination of the metastable content in the ion beams for Xe5+ and Xe6+. The experiments were performed by merging a synchrotron photon beam generated by an undulator beamline of the Advanced Light Source with an ion beam produced by an electron cyclotron resonance ion source.
Original languageEnglish
Article number032717
Pages (from-to)032717-1-032717-10
Number of pages10
JournalPhysical Review A
Volume73
Issue number3
DOIs
Publication statusPublished - 2006

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Absolute photoionization cross sections for Xe<sup>4+,</sup> Xe<sup>5+</sup>, and Xe<sup>6+</sup> near 13.5 nm: Experiment and theory'. Together they form a unique fingerprint.

  • Cite this

    Aguilar, A., Gillaspy, J. D., Gribakin, G. F., Phaneuf, R. A., Gharaibeh, M. F., Kozlov, M. G., Bozek, J. D., & Kilcoyne, A. L. D. (2006). Absolute photoionization cross sections for Xe4+, Xe5+, and Xe6+ near 13.5 nm: Experiment and theory. Physical Review A, 73(3), 032717-1-032717-10. [032717]. https://doi.org/10.1103/PhysRevA.73.032717