An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP

V.S.C. Len, David McNeill, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	E7.4.1-E7.4.6
Number of pages	6
Publication status	Published - Apr 2000
Event	MRS Symposium Proceedings - San Francisco, United States Duration: 01 Apr 2000 → 01 Apr 2000

Cite this

@conference{d928af70540d4e3687e56735944ab089,

title = "An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP",

author = "V.S.C. Len and David McNeill and Harold Gamble",

year = "2000",

month = apr,

language = "English",

pages = "E7.4.1--E7.4.6",

note = "MRS Symposium Proceedings ; Conference date: 01-04-2000 Through 01-04-2000",

}