An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP

V.S.C. Len, David McNeill, Harold Gamble

Research output: Contribution to conferencePaper

1 Citation (Scopus)
Original languageEnglish
Number of pages6
Publication statusPublished - Apr 2000
EventMRS Symposium Proceedings - San Francisco, United States
Duration: 01 Apr 200001 Apr 2000


ConferenceMRS Symposium Proceedings
CountryUnited States
CitySan Francisco

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