An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP

V.S.C. Len, David McNeill, Harold Gamble

Research output: Contribution to conferencePaper

1 Citation (Scopus)
Original languageEnglish
PagesE7.4.1-E7.4.6
Number of pages6
Publication statusPublished - Apr 2000
EventMRS Symposium Proceedings - San Francisco, United States
Duration: 01 Apr 200001 Apr 2000

Conference

ConferenceMRS Symposium Proceedings
CountryUnited States
CitySan Francisco
Period01/04/200001/04/2000

Cite this

Len, V. S. C., McNeill, D., & Gamble, H. (2000). An evaluation of the effects of benzotriazole in NH4OH slurry for copper CMP. E7.4.1-E7.4.6. Paper presented at MRS Symposium Proceedings, San Francisco, United States.