An integrated chromatographychip for rapid gas separation and detection, 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

This paper reports the first implementation of a highly sensitive micro discharge photoionization detector (μDPID) in a silicon-glass architecture and its monolithic integration with a high performance micro separation column. The new detector requires a two-mask fabrication process, is universal, non-destructive, low power (<;2.5mW), and insensitive to flow and temperature variations. It has yielded a minimum detection limit of ~10pg which is on par with the widely used destructive flame ionization detector. The integrated chip comprises a newly developed semi-packed column with atomic layer deposited (ALD) stationary phases and is capable of multi-analyte gas mixture separation and their trace level identification while allowing the use of temperature programming for enhanced separation performance and speed.