An integrated chromatographychip for rapid gas separation and detection, 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

This paper reports the first implementation of a highly sensitive micro discharge photoionization detector (μDPID) in a silicon-glass architecture and its monolithic integration with a high performance micro separation column. The new detector requires a two-mask fabrication process, is universal, non-destructive, low power (<;2.5mW), and insensitive to flow and temperature variations. It has yielded a minimum detection limit of ~10pg which is on par with the widely used destructive flame ionization detector. The integrated chip comprises a newly developed semi-packed column with atomic layer deposited (ALD) stationary phases and is capable of multi-analyte gas mixture separation and their trace level identification while allowing the use of temperature programming for enhanced separation performance and speed.
Original languageEnglish
Pages771-774
Number of pages4
DOIs
Publication statusPublished - 18 Jan 2015

Fingerprint Dive into the research topics of 'An integrated chromatographychip for rapid gas separation and detection, 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).'. Together they form a unique fingerprint.

Cite this