TY - GEN

T1 - Approximation Algorithms for the Wafer to Wafer Integration Problem

AU - Dokka, Trivikram

AU - Bougeret, Marin

AU - Boudet, Vincent

AU - Giroudeau, Rodolphe

AU - Spieksma, Frits C. R.

PY - 2013

Y1 - 2013

N2 - Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 32 and 43 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.

AB - Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 32 and 43 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.

U2 - 10.1007/978-3-642-38016-7_23

DO - 10.1007/978-3-642-38016-7_23

M3 - Conference contribution

T3 - Lecture Notes in Computer Science

SP - 286

EP - 297

BT - Approximation and Online Algorithms. 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers

PB - Springer

ER -