TY - GEN
T1 - Approximation Algorithms for the Wafer to Wafer Integration Problem
AU - Dokka, Trivikram
AU - Bougeret, Marin
AU - Boudet, Vincent
AU - Giroudeau, Rodolphe
AU - Spieksma, Frits C. R.
PY - 2013
Y1 - 2013
N2 - Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 32 and 43 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.
AB - Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 32 and 43 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.
U2 - 10.1007/978-3-642-38016-7_23
DO - 10.1007/978-3-642-38016-7_23
M3 - Conference contribution
T3 - Lecture Notes in Computer Science
SP - 286
EP - 297
BT - Approximation and Online Algorithms. 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers
PB - Springer
ER -