Approximation Algorithms for the Wafer to Wafer Integration Problem

Trivikram Dokka, Marin Bougeret, Vincent Boudet, Rodolphe Giroudeau, Frits C. R. Spieksma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Motivated by the yield optimization problem in semi-conductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 32 and 43 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special case of the yield optimization problem can be solved in polynomial time.
Original languageEnglish
Title of host publicationApproximation and Online Algorithms. 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers
PublisherSpringer
Pages 286-297
ISBN (Electronic)978-3-642-38016-7
DOIs
Publication statusPublished - 2013
Externally publishedYes

Publication series

NameLecture Notes in Computer Science
PublisherSpringer
Volume7846

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