Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2

Y. Hayashi, S. Hirao, Y. Zhang, Timo Gans, Deborah O'Connell, Petrovic Z. Lj, T. Makabe

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

We have measured the densities of 1s5 and 1s3 argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150W, quenching by oxygen molecules begins to dominate and the metastable density drops again.
Original languageEnglish
Article number145206
Pages (from-to)145206-145206-6
Number of pages145201
JournalJournal of Physics D: Applied Physics
Volume42
Issue number14
DOIs
Publication statusPublished - Jul 2009

Fingerprint

Argon
Inductively coupled plasma
metastable state
Quenching
argon
Oxygen
Laser spectroscopy
Molecular oxygen
Absorption spectroscopy
Carrier concentration
oxygen
Molecules
quenching
Electrons
laser spectroscopy
absorption spectroscopy
molecules
electrons

Cite this

Hayashi, Y., Hirao, S., Zhang, Y., Gans, T., O'Connell, D., Lj, P. Z., & Makabe, T. (2009). Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2. Journal of Physics D: Applied Physics, 42(14), 145206-145206-6. [145206]. https://doi.org/10.1088/0022-3727/42/14/145206
Hayashi, Y. ; Hirao, S. ; Zhang, Y. ; Gans, Timo ; O'Connell, Deborah ; Lj, Petrovic Z. ; Makabe, T. / Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2. In: Journal of Physics D: Applied Physics. 2009 ; Vol. 42, No. 14. pp. 145206-145206-6.
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abstract = "We have measured the densities of 1s5 and 1s3 argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7{\%} to 15{\%} for powers between 50 and 150W, quenching by oxygen molecules begins to dominate and the metastable density drops again.",
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Hayashi, Y, Hirao, S, Zhang, Y, Gans, T, O'Connell, D, Lj, PZ & Makabe, T 2009, 'Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2', Journal of Physics D: Applied Physics, vol. 42, no. 14, 145206, pp. 145206-145206-6. https://doi.org/10.1088/0022-3727/42/14/145206

Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2. / Hayashi, Y.; Hirao, S.; Zhang, Y.; Gans, Timo; O'Connell, Deborah; Lj, Petrovic Z.; Makabe, T.

In: Journal of Physics D: Applied Physics, Vol. 42, No. 14, 145206, 07.2009, p. 145206-145206-6.

Research output: Contribution to journalArticle

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T1 - Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2

AU - Hayashi, Y.

AU - Hirao, S.

AU - Zhang, Y.

AU - Gans, Timo

AU - O'Connell, Deborah

AU - Lj, Petrovic Z.

AU - Makabe, T.

PY - 2009/7

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N2 - We have measured the densities of 1s5 and 1s3 argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150W, quenching by oxygen molecules begins to dominate and the metastable density drops again.

AB - We have measured the densities of 1s5 and 1s3 argon metastables as a function of the abundance of molecular oxygen in an inductively coupled plasma (ICP) in mixtures of Ar and O2. Laser absorption spectroscopy was used to determine the densities of the metastables. It was found that even small abundances of oxygen lead to large increases in metastable density, mostly due to the reduction in the electron number density, since electron-induced quenching determines the metastable density. At abundances higher than 7% to 15% for powers between 50 and 150W, quenching by oxygen molecules begins to dominate and the metastable density drops again.

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JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

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