Atmospheric Pressure Chemical Vapour Deposition of thin Films of Nb2O5 on Glass

S.A. O'Neill, I.P. Parkin, R.J.H. Clark, Andrew Mills, N. Elliott

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)


A novel route involving atmospheric pressure chemical vapour deposition (APCVD) is reported for coating Nb2O5 onto glass substrates via the reaction of NbCl5 and ethyl acetate at 400-660degreesC. Raman spectroscopy is shown to be a simple diagnostic tool for the analysis of these thin films. The contact angle of water on Nb2O5-coated glass drops on UV irradiation from 60degrees to 5-20degrees. XPS Analysis showed that the Nb:O ratio of the film was 1:2.5. Glancing angle X-ray diffraction showed that all films were crystalline, with only a single phase being observed; this has some preferred orientation in the (201) plane of Nb2O5. The niobium(V) oxide materials show minimal photocatalytic ability to degrade organic material.
Original languageEnglish
Pages (from-to)2952-2956
Number of pages5
JournalJournal of Materials Chemistry
Issue number12
Publication statusPublished - Dec 2003

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Materials Chemistry
  • Materials Science(all)


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