Atmospheric-pressure plasma activation for low temperature bonding

Y.W. Low, Paul Rainey, Paul Baine, John Montgomery, Neil Mitchell, David McNeill, Harold Gamble, Mervyn Armstrong

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Oct 2010
Event218th ECS Meeting, Semiconductor Wafer Bonding: Science, Technology & Applications - Las Vegas, United States
Duration: 01 Oct 201001 Oct 2010

Conference

Conference218th ECS Meeting, Semiconductor Wafer Bonding: Science, Technology & Applications
CountryUnited States
CityLas Vegas
Period01/10/201001/10/2010

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