Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma

S. Gomez, P.G. Steen, William Graham

Research output: Contribution to journalArticlepeer-review

76 Citations (Scopus)

Abstract

Spatially resolved measurements of the atomic oxygen densities close to a sample surface in a dual mode (capacitive/inductive) rf plasma are used to measure the atomic oxygen surface loss coefficient beta on stainless steel and aluminum substrates, silicon and silicon dioxide wafers, and on polypropylene samples. beta is found to be particularly sensitive to the gas pressure for both operating modes. It is concluded that this is due to the effect of changing atom and ion flux to the surface. (C) 2002 American Institute of Physics.
Original languageEnglish
Pages (from-to)19-21
Number of pages3
JournalApplied Physics Letters
Volume81(1)
Issue number1
DOIs
Publication statusPublished - 01 Jul 2002

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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