Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges

Gian Antonio Susto, Simone Pampuri, Andrea Schirru, Giuseppe De Nicolao, Seán McLoone

Research output: Contribution to conferencePaper

Original languageEnglish
Publication statusPublished - 2012
Event10th European Workshop on Advanced Control and Diagnosis 2012 - Copenhagen, Denmark
Duration: 08 Oct 201209 Oct 2012

Conference

Conference10th European Workshop on Advanced Control and Diagnosis 2012
CountryDenmark
CityCopenhagen
Period08/10/201209/10/2012

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