Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges

Gian Antonio Susto, Simone Pampuri, Andrea Schirru, Giuseppe De Nicolao, Seán McLoone

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Published - 2012
Event	10th European Workshop on Advanced Control and Diagnosis 2012 - Copenhagen, Denmark Duration: 08 Oct 2012 → 09 Oct 2012

Conference	10th European Workshop on Advanced Control and Diagnosis 2012
Country/Territory	Denmark
City	Copenhagen
Period	08/10/2012 → 09/10/2012

Cite this

@conference{f835af983d4041cab33b0f6d49371560,

title = "Automatic Control and Machine Learning for Semiconductor Manufacturing: Review and Challenges",

author = "Susto, {Gian Antonio} and Simone Pampuri and Andrea Schirru and {De Nicolao}, Giuseppe and Se{\'a}n McLoone",

year = "2012",

language = "English",

note = "10th European Workshop on Advanced Control and Diagnosis 2012 ; Conference date: 08-10-2012 Through 09-10-2012",

}