Boron Etch-Stop for MEMS Applications

Paul Rainey, Hao Zhou, Neil Mitchell, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages75-78
Number of pages4
Publication statusPublished - Oct 2002
EventMicromechanics Europe Workshop MME 2002 - Sinaia, Romania
Duration: 01 Oct 200201 Oct 2002

Conference

ConferenceMicromechanics Europe Workshop MME 2002
CountryRomania
CitySinaia
Period01/10/200201/10/2002

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