Buried Dielectrics for GeOI

Mervyn Armstrong, Frederick Ruddell, Haydn Wadsworth, Harold Gamble, David McNeill

Research output: Contribution to conferencePaper

Original languageEnglish
Pages43-44
Number of pages2
Publication statusPublished - Mar 2006
EventProc. EUROSOI 2006 Workshop of the Thematic Network on Silicon on Insulator technology, devices & circuits - Grenoble, France
Duration: 01 Mar 200601 Mar 2006

Conference

ConferenceProc. EUROSOI 2006 Workshop of the Thematic Network on Silicon on Insulator technology, devices & circuits
CountryFrance
CityGrenoble
Period01/03/200601/03/2006

Cite this

Armstrong, M., Ruddell, F., Wadsworth, H., Gamble, H., & McNeill, D. (2006). Buried Dielectrics for GeOI. 43-44. Paper presented at Proc. EUROSOI 2006 Workshop of the Thematic Network on Silicon on Insulator technology, devices & circuits, Grenoble, France.