Buried polysilicon hot-wire anemometer with integrated bulk micromachined channel

H. Zhao, John Montgomery, Neil Mitchell, Harold Gamble

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)493-500
Number of pages8
JournalSPIE Journal of Microlithography, Microfabrication, and Microsystems
Issue number3
Publication statusPublished - Jul 2004

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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