@article{45b37b47dcfb43209630dc5cdefcc01c,
title = "Buried polysilicon hot-wire anemometer with integrated bulk micromachined channel",
author = "H. Zhao and John Montgomery and Neil Mitchell and Harold Gamble",
year = "2004",
month = jul,
doi = "10.1117/1.1758726",
language = "English",
volume = "3(3)",
pages = "493--500",
journal = "SPIE Journal of Microlithography, Microfabrication, and Microsystems",
issn = "1537-1646",
publisher = "SPIE - The International Society for Optical Engineering",
number = "3",
}