Carbon-plasma produced in vacuum by 532 nm-3 ns laser pulses ablation

L. Torrisi*, F. Caridi, D. Margarone, A. Picciotto, A. Mangione, J. J. Beltrano

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)

Abstract

A study of VIS laser ablation of graphite, in vacuum, by using 3 ns Nd:YAG laser radiation is reported. Nanosecond pulsed ablation gives an emission mass spectrum attributable to C n neutral and charged particles. Mass quadrupole spectroscopy, associated to electrostatic ion deflection, allows estimation of the velocity distributions of several of these emitting species within the plume as a function of the incident laser fluence. Time gated plume imaging and microscopy measurements have been used to study the plasma composition and the deposition of thin carbon films. The multi-component structure of the plume emission is rationalized in terms of charge state, ions temperature and neutrals temperature. A special regard is given to the ion acceleration process occurring inside the plasma due to the high electrical field generated in the non-equilibrium plasma conditions. The use of nanosecond laser pulses, at fluences below 10 J/cm 2 , produces interesting C-atomic emission effects, as a high ablation yield, a high fractional ionization of the plasma and presence of nanostructures deposited on near substrates.

Original languageEnglish
Pages (from-to)6383-6389
Number of pages7
JournalApplied Surface Science
Volume252
Issue number18
DOIs
Publication statusPublished - 15 Jul 2006
Externally publishedYes

Bibliographical note

Copyright:
Copyright 2019 Elsevier B.V., All rights reserved.

Keywords

  • Carbon plasma
  • Laser ablation
  • Plasma temperature

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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