Carrier mobility variations in self-aligned germanium MOS transistors

Yee Low, D. Tantraviwat, Paul Rainey, Paul Baine, David McNeill, Neil Mitchell, Mervyn Armstrong, Harold Gamble

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@article{ef14c31bfd16413d9e64ed5597e88ca7,

title = "Carrier mobility variations in self-aligned germanium MOS transistors",

author = "Yee Low and D. Tantraviwat and Paul Rainey and Paul Baine and David McNeill and Neil Mitchell and Mervyn Armstrong and Harold Gamble",

year = "2010",

month = apr,

language = "English",

volume = "28(1)",

pages = "43--49",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - Carrier mobility variations in self-aligned germanium MOS transistors

AU - Low, Yee

AU - Tantraviwat, D.

AU - Rainey, Paul

AU - Baine, Paul

AU - McNeill, David

AU - Mitchell, Neil

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 2010/4

Y1 - 2010/4

UR - http://www.scopus.com/inward/record.url?scp=78650527567&partnerID=8YFLogxK

M3 - Article

VL - 28(1)

SP - 43

EP - 49

JO - ECS Transactions

JF - ECS Transactions

SN - 1938-5862

ER -