Characterisation of copper inductors fabricated by dual damascene and electroplating techniques

B.H.W. Toh, David McNeill, Harold Gamble

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)233-238
Number of pages6
JournalJournal of Materials Science: Materials in Electronics
Volume16(4)
Issue number4
Publication statusPublished - Apr 2005

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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