Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques

B.H.W. Toh, Daniel Bien, David McNeill, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Sep 2004
Event28th Annual Microscopical Society of Ireland (MSI) Meeting - Dublin, Ireland
Duration: 01 Sep 200401 Sep 2004

Conference

Conference28th Annual Microscopical Society of Ireland (MSI) Meeting
CountryIreland
CityDublin
Period01/09/200401/09/2004

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