| Original language | English |
|---|---|
| Pages | 0-0 |
| Number of pages | 1 |
| Publication status | Published - Sep 2004 |
| Event | 28th Annual Microscopical Society of Ireland (MSI) Meeting - Dublin, Ireland Duration: 01 Sep 2004 → 01 Sep 2004 |
Conference
| Conference | 28th Annual Microscopical Society of Ireland (MSI) Meeting |
|---|---|
| Country | Ireland |
| City | Dublin |
| Period | 01/09/2004 → 01/09/2004 |
Cite this
Toh, B. H. W., Bien, D., McNeill, D., & Gamble, H. (2004). Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques. 0-0. Paper presented at 28th Annual Microscopical Society of Ireland (MSI) Meeting, Dublin, Ireland.
@conference{f427f4a1c95143a8badf46506459c778,
title = "Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques",
author = "B.H.W. Toh and Daniel Bien and David McNeill and Harold Gamble",
year = "2004",
month = "9",
language = "English",
pages = "0--0",
note = "28th Annual Microscopical Society of Ireland (MSI) Meeting ; Conference date: 01-09-2004 Through 01-09-2004",
}
Toh, BHW, Bien, D, McNeill, D & Gamble, H 2004, 'Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques', Paper presented at 28th Annual Microscopical Society of Ireland (MSI) Meeting, Dublin, Ireland, 01/09/2004 - 01/09/2004 pp. 0-0.
Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques. / Toh, B.H.W.; Bien, Daniel; McNeill, David; Gamble, Harold.
2004. 0-0 Paper presented at 28th Annual Microscopical Society of Ireland (MSI) Meeting, Dublin, Ireland.Research output: Contribution to conference › Paper
TY - CONF
T1 - Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques
AU - Toh, B.H.W.
AU - Bien, Daniel
AU - McNeill, David
AU - Gamble, Harold
PY - 2004/9
Y1 - 2004/9
M3 - Paper
SP - 0
EP - 0
ER -
Toh BHW, Bien D, McNeill D, Gamble H. Characterisation of copper inductors fabricated on low-k SOG dielectric layers and low resistivity silicon wafers by electroplating techniques. 2004. Paper presented at 28th Annual Microscopical Society of Ireland (MSI) Meeting, Dublin, Ireland.