Characterisation of masking materials for deep glass micromachining

Daniel Bien, Paul Rainey, Neil Mitchell, Harold Gamble

Research output: Contribution to journalArticle

67 Citations (Scopus)
Original languageEnglish
Pages (from-to)S34-S40
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume13(4)
Issue number4
DOIs
Publication statusPublished - Jul 2003

ASJC Scopus subject areas

  • Computational Mechanics
  • Mechanics of Materials
  • Materials Science(all)
  • Instrumentation

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