Characteristics of single crystal "thin film" capacitor structures made using a focused ion beam microscope

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@article{056075375da34481a9c81cb9ebbc504c,

title = "Characteristics of single crystal {"}thin film{"} capacitor structures made using a focused ion beam microscope",

author = "Mohamed Saad and Robert Bowman and Marty Gregg",

year = "2004",

month = feb,

day = "16",

doi = "10.1063/1.1645318",

language = "English",

volume = "84",

pages = "1159--1161",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "7",

}

TY - JOUR

T1 - Characteristics of single crystal "thin film" capacitor structures made using a focused ion beam microscope

AU - Saad, Mohamed

AU - Bowman, Robert

AU - Gregg, Marty

PY - 2004/2/16

Y1 - 2004/2/16

UR - https://www.scopus.com/pages/publications/1542784196

U2 - 10.1063/1.1645318

DO - 10.1063/1.1645318

M3 - Article

SN - 0003-6951

VL - 84

SP - 1159

EP - 1161

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

ER -