A compact 10 ECR ion source (200 mm long, 170 mm diameter) has been developed and tested. The complete magnetic structure made from permanent magnet material is comprised of four ring magnets producing an asymmetric axial magnetic field and a hexapole magnet with a maximum radial field of 0.94 T inside the plasma chamber. The coupling of the microwave to the plasma shows efficient ECR plasma heating at microwave power levels around 10 watts. Charge state distributions for various elements with intensities up to 320 eμA and their dependence on operation parameters will be presented as well as VUV spectra in the wavelength region down to 15 nm.
|Number of pages||3|
|Publication status||Published - 01 Dec 1998|
|Event||Proceedings of the 1997 17th Particle Accelerator Conference, PAC-97 - Vancouver, Canada|
Duration: 12 May 1997 → 16 May 1997
|Conference||Proceedings of the 1997 17th Particle Accelerator Conference, PAC-97|
|Period||12/05/1997 → 16/05/1997|
ASJC Scopus subject areas