Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator

N. Zainal, Neil Mitchell, David McNeill, Michael Bain, Mervyn Armstrong, Paul Baine, D. Adley, T.S. Perova

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@article{dd9498fd601f4e008cf869d7bc48b77a,

title = "Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator",

author = "N. Zainal and Neil Mitchell and David McNeill and Michael Bain and Mervyn Armstrong and Paul Baine and D. Adley and T.S. Perova",

year = "2012",

month = apr,

doi = "10.1149/1.3700467",

language = "English",

volume = "45",

pages = "169--180",

journal = "ECS Transactions",

publisher = "Electrochemical Society, Inc.",

}

TY - JOUR

T1 - Characterization of Rapid Melt Growth (RMG) Process for High Quality Thin Film Germanium on Insulator

AU - Zainal, N.

AU - Mitchell, Neil

AU - McNeill, David

AU - Bain, Michael

AU - Armstrong, Mervyn

AU - Baine, Paul

AU - Adley, D.

AU - Perova, T.S.

PY - 2012/4

Y1 - 2012/4

U2 - 10.1149/1.3700467

DO - 10.1149/1.3700467

M3 - Article

VL - 45

SP - 169

EP - 180

JO - ECS Transactions

JF - ECS Transactions

ER -