Original language | English |
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Pages | 1008-1015 |
Number of pages | 8 |
Publication status | Published - May 2003 |
Event | Electrochemical Society Proceedings Chemical Vapour Deposition XIV and EUROCVD - Paris, France Duration: 01 May 2003 → 01 May 2003 |
Conference
Conference | Electrochemical Society Proceedings Chemical Vapour Deposition XIV and EUROCVD |
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Country/Territory | France |
City | Paris |
Period | 01/05/2003 → 01/05/2003 |