| Original language | English |
|---|---|
| Pages | 1008-1015 |
| Number of pages | 8 |
| Publication status | Published - May 2003 |
| Event | Electrochemical Society Proceedings Chemical Vapour Deposition XIV and EUROCVD - Paris, France Duration: 01 May 2003 → 01 May 2003 |
Conference
| Conference | Electrochemical Society Proceedings Chemical Vapour Deposition XIV and EUROCVD |
|---|---|
| Country/Territory | France |
| City | Paris |
| Period | 01/05/2003 → 01/05/2003 |
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