Chlorine plasma system instabilities within an ICP tool driven at a frequency of 13.56 MHz

F. Soberon, Fernando Garcia- Marro, William Graham, A.R. Ellingboe, V.J. Law

Research output: Contribution to journalArticle

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)193-203
Number of pages11
JournalPlasma Sources Science & Technology
Volume15
Issue number2
Publication statusPublished - 01 May 2006

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Condensed Matter Physics

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