Chlorine plasma system instabilities within an ICP tool driven at a frequency of 13.56 MHz

F. Soberon, Fernando Garcia- Marro, William Graham, A.R. Ellingboe, V.J. Law

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	193-203
Number of pages	11
Journal	Plasma Sources Science & Technology
Volume	15
Issue number	2
Publication status	Published - 01 May 2006

ASJC Scopus subject areas

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AU - Law, V.J.

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