CMOS compatible RF MEMS switches with serpentine springs

X.L. Evans, Harold Gamble, Paul Baine, Neil Mitchell, John Montgomery, Michael Bain, Paul Rainey, Daniel Bien

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Abstract

This paper describes a serpentine flexure spring design and fabrication process development for radio frequency microelectromechanical (RF MEMS) capacitive switches with coplanar waveguide (CPW) lines. Sputtered tungsten is employed as the CPW line conductor instead of Au, a non-Si compatible material. The bridge membrane is fabricated from Al. The materials and fabrication process can be integrated with CMOS and SOI technology to reduce cost. Results show the MEMS switch has excellent performance with insertion loss 0.3dB, return loss -27dB at 30GHz and high isolation -30dB at 40GHz. The process developed promises to simplify the design and fabrication of RF MEMS on silicon.
Original languageEnglish
Pages (from-to)9-14
Number of pages6
JournalECS Transactions
Volume18
Issue number1
DOIs
Publication statusPublished - 2009

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