Comparison of Si1-yCy films produced by solid-phase epitaxy and rapid thermal chemical vapour deposition

S.K. Ray, David McNeill, D.L. Gay, C.K. Maiti, Alastair Armstrong, Mervyn Armstrong, Harold Gamble

Research output: Contribution to journalArticle

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)149-152
Number of pages4
JournalThin Solid Films
Volume294(1-2)
Publication statusPublished - Feb 1997

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