Composition and stress analysis in Si structures using micro-raman spectroscopy

Mervyn Armstrong, Harold Gamble

Research output: Contribution to journalArticle

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)235-239
Number of pages5
JournalScanning
Volume25(5)
Issue number5
Publication statusPublished - Sep 2004

ASJC Scopus subject areas

  • Instrumentation

Cite this