Composition and stress analysis in Si structures using micro-Raman spectroscopy

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Apr 2004
Event	SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology - Paris, France Duration: 01 Apr 2004 → 01 Apr 2004

Conference	SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology
Country/Territory	France
City	Paris
Period	01/04/2004 → 01/04/2004

Cite this

@conference{ea07cfbc6c2745e9adb563c6d44d32ad,

title = "Composition and stress analysis in Si structures using micro-Raman spectroscopy",

author = "Mervyn Armstrong and Harold Gamble",

year = "2004",

month = apr,

language = "English",

pages = "0--0",

note = "SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology ; Conference date: 01-04-2004 Through 01-04-2004",

}

TY - CONF

T1 - Composition and stress analysis in Si structures using micro-Raman spectroscopy

AU - Armstrong, Mervyn

AU - Gamble, Harold

PY - 2004/4

Y1 - 2004/4

UR - http://www.scopus.com/inward/record.url?scp=6344247467&partnerID=8YFLogxK

M3 - Paper

SP - 0

EP - 0

T2 - SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology

Y2 - 1 April 2004 through 1 April 2004

ER -