Composition and stress analysis in Si structures using micro-Raman spectroscopy

Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

12 Citations (Scopus)
Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Apr 2004
EventSPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology - Paris, France
Duration: 01 Apr 200401 Apr 2004

Conference

ConferenceSPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology
CountryFrance
CityParis
Period01/04/200401/04/2004

Cite this

Armstrong, M., & Gamble, H. (2004). Composition and stress analysis in Si structures using micro-Raman spectroscopy. 0-0. Paper presented at SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology, Paris, France.