Composition and stress analysis in Si structures using micro-raman spectroscopy

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@article{d48d49d8f1fc451585110d7969f89c80,

title = "Composition and stress analysis in Si structures using micro-raman spectroscopy",

author = "Mervyn Armstrong and Harold Gamble",

year = "2004",

month = sep,

language = "English",

volume = "25(5)",

pages = "235--239",

journal = "Scanning",

publisher = "John Wiley \& Sons Inc.",

number = "5",

}