Conduit diffusion of dopants in tungsten silicide layers

Mervyn Armstrong, Harold Gamble, Michael Bain, Paul Baine, David McNeill

Research output: Contribution to conferencePaper

Original languageEnglish
Pages65-70
Number of pages6
Publication statusPublished - Mar 2008
EventProc IEEE Conference on Microelectronic Test Structures - Edinburgh, United Kingdom
Duration: 01 Mar 200801 Mar 2008

Conference

ConferenceProc IEEE Conference on Microelectronic Test Structures
Country/TerritoryUnited Kingdom
CityEdinburgh
Period01/03/200801/03/2008

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