The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Kawasaki, S., Catalan, G., Fan, H. J., Saad, M. M., Gregg, M., Correa-Duarte, M. A., Rybczynski, J., Morrison, F. D., Tatsuta, T., Tsuji, O., & Scott, J. F. (2008). Conformal oxide coating of carbon nanotubes. Applied Physics Letters, 92(5), 053109-053109. . https://doi.org/10.1063/1.2841710