Conformal oxide coating of carbon nanotubes

S. Kawasaki, G. Catalan, H.J. Fan, M.M. Saad, Marty Gregg, M.A. Correa-Duarte, J. Rybczynski, F.D. Morrison, T. Tatsuta, O. Tsuji, J.F. Scott

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38 Citations (Scopus)

Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories.
Original languageEnglish
Article number053109
Pages (from-to)053109-053109
Number of pages1
JournalApplied Physics Letters
Volume92
Issue number5
DOIs
Publication statusPublished - Feb 2008

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Kawasaki, S., Catalan, G., Fan, H. J., Saad, M. M., Gregg, M., Correa-Duarte, M. A., Rybczynski, J., Morrison, F. D., Tatsuta, T., Tsuji, O., & Scott, J. F. (2008). Conformal oxide coating of carbon nanotubes. Applied Physics Letters, 92(5), 053109-053109. [053109]. https://doi.org/10.1063/1.2841710