Control of Leakage Current in Polysilicon TFT´s by the Implantation of Boron

L.J. Quinn, Paul Baine, Brian Lee, Neil Mitchell, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	588-591
Number of pages	4
Publication status	Published - Sept 1998
Event	ESSDERC'98 - , United Kingdom Duration: 01 Sept 1998 → …

Cite this

@conference{e4152c3925c241b9a2bacf07b2f1c73b,

title = "Control of Leakage Current in Polysilicon TFT´s by the Implantation of Boron",

author = "L.J. Quinn and Paul Baine and Brian Lee and Neil Mitchell and Mervyn Armstrong and Harold Gamble",

year = "1998",

month = sep,

language = "English",

pages = "588--591",

note = "ESSDERC'98 ; Conference date: 01-09-1998",

}