CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

R.C. Cheshire, Bill Graham, Thomas Morrow, V. Kornas, H.F. Dobele, K. Donnelly, D.P. Dowling, T.P. Obrien

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)3152-3154
Number of pages3
JournalApplied Physics Letters
Volume66
Publication statusPublished - 1995

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