CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

R.C. Cheshire, Bill Graham, Thomas Morrow, V. Kornas, H.F. Dobele, K. Donnelly, D.P. Dowling, T.P. Obrien

Research output: Contribution to journal › Article › peer-review

Cite this

@article{c01b2a46e0dd4cef84f3e53dda60c5ec,

title = "CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION",

author = "R.C. Cheshire and Bill Graham and Thomas Morrow and V. Kornas and H.F. Dobele and K. Donnelly and D.P. Dowling and T.P. Obrien",

year = "1995",

language = "English",

volume = "66",

pages = "3152--3154",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - CORRELATION OF MOLECULAR-HYDROGEN DISSOCIATION AND THE FILM QUALITY OF DIAMOND-LIKE CARBON IN PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

AU - Cheshire, R.C.

AU - Graham, Bill

AU - Morrow, Thomas

AU - Kornas, V.

AU - Dobele, H.F.

AU - Donnelly, K.

AU - Dowling, D.P.

AU - Obrien, T.P.

PY - 1995

Y1 - 1995

M3 - Article

SN - 0003-6951

VL - 66

SP - 3152

EP - 3154

JO - Applied Physics Letters

JF - Applied Physics Letters

ER -