Defect production during ion-assisted deposition of molybdenum films studied by Molecular Dynamics

Peter Klaver, B.J. Thijsse

Research output: Contribution to conference › Paper

Original language	English
Pages	51
Number of pages	1
Publication status	Published - 1999
Event	Materials Research Society Fall meeting - Boston, United States Duration: 01 Jan 1999 → 01 Jan 1999

Conference	Materials Research Society Fall meeting
Country	United States
City	Boston
Period	01/01/1999 → 01/01/1999

Cite this

@conference{d2c0831a59184792a6750442b47061d2,

title = "Defect production during ion-assisted deposition of molybdenum films studied by Molecular Dynamics",

author = "Peter Klaver and B.J. Thijsse",

year = "1999",

language = "English",

pages = "51",

note = "Materials Research Society Fall meeting ; Conference date: 01-01-1999 Through 01-01-1999",

}