Defect production during ion-assisted deposition of molybdenum films studied by Molecular Dynamics

Peter Klaver, B.J. Thijsse

Research output: Contribution to conferencePaper

4 Citations (Scopus)
Original languageEnglish
Pages51
Number of pages1
Publication statusPublished - 1999
EventMaterials Research Society Fall meeting - Boston, United States
Duration: 01 Jan 199901 Jan 1999

Conference

ConferenceMaterials Research Society Fall meeting
CountryUnited States
CityBoston
Period01/01/199901/01/1999

Cite this