Diagnostic of rf discharge plasma by Thomson scattering with gated intensified charge coupled device detectors

S.A. Moshkalyov, C. Thompson, Thomas Morrow, Bill Graham

Research output: Contribution to conference › Paper

Original language	English
Pages	1395-1400
Number of pages	6
Publication status	Published - Oct 2000
Event	46th National Symposium of the American-Vacuum-Society - Seattle, Washington, United States Duration: 01 Oct 2000 → 01 Oct 2000

Conference	46th National Symposium of the American-Vacuum-Society
Country/Territory	United States
City	Seattle, Washington
Period	01/10/2000 → 01/10/2000

Cite this

@conference{e14ba122b7d24672baaea739646815cb,

title = "Diagnostic of rf discharge plasma by Thomson scattering with gated intensified charge coupled device detectors",

author = "S.A. Moshkalyov and C. Thompson and Thomas Morrow and Bill Graham",

year = "2000",

month = oct,

language = "English",

pages = "1395--1400",

note = "46th National Symposium of the American-Vacuum-Society ; Conference date: 01-10-2000 Through 01-10-2000",

}

TY - CONF

T1 - Diagnostic of rf discharge plasma by Thomson scattering with gated intensified charge coupled device detectors

AU - Moshkalyov, S.A.

AU - Thompson, C.

AU - Morrow, Thomas

AU - Graham, Bill

PY - 2000/10

Y1 - 2000/10

M3 - Paper

SP - 1395

EP - 1400

T2 - 46th National Symposium of the American-Vacuum-Society

Y2 - 1 October 2000 through 1 October 2000

ER -