Diagnostic of rf discharge plasma by Thomson scattering with gated intensified charge coupled device detectors

S.A. Moshkalyov, C. Thompson, Thomas Morrow, Bill Graham

Research output: Contribution to conferencePaper

15 Citations (Scopus)
Original languageEnglish
Pages1395-1400
Number of pages6
Publication statusPublished - Oct 2000
Event46th National Symposium of the American-Vacuum-Society - Seattle, Washington, United States
Duration: 01 Oct 200001 Oct 2000

Conference

Conference46th National Symposium of the American-Vacuum-Society
CountryUnited States
CitySeattle, Washington
Period01/10/200001/10/2000

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