Dissociative electron attachment to the highly reactive difluoromethylene molecule–importance of CF2 for negative ion formation in fluorocarbon plasmas

K. Graupner, T. A. Field, C.A. Mayhew

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16 Citations (Scopus)
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Abstract

Dissociative electron attachment to the highly reactive difluoromethylene molecule, CF2, produced in a C3F6/He microwave plasma and stepwise via the fast atom reaction CF3I+H?CF3+HI and CF3+H?CF2+HF, has been investigated. The upper limit for the cross section of formation of F- via dissociative electron attachment to CF2 is estimated to be 5×10-4?Å2. This value is four orders of magnitude smaller than the cross section previously predicted from scattering calculations. It is concluded that difluoromethylene plays a negligible role in negative ion formation in fluorocarbon plasmas.
Original languageEnglish
Article number083035
Number of pages16
JournalNew Journal of Physics
Volume12
DOIs
Publication statusPublished - 17 Aug 2010

Bibliographical note

The authors are very grateful to the EPSRC for financial support of this work through grant EP/F031025/1. CAM is grateful for a travel grant from the 'UK network in non-thermal plasma science' funded through the EPSRC (EP/C010787/1).

ASJC Scopus subject areas

  • General Physics and Astronomy

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