Original language | English |
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Pages (from-to) | 331-341 |
Number of pages | 11 |
Journal | ECS Transactions |
Volume | 28(1) |
Publication status | Published - Apr 2010 |
Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI
Mervyn Armstrong, Paul Baine, John Montgomery, David McNeill, Harold Gamble, Michael Bain
Research output: Contribution to journal › Article › peer-review