Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI

Mervyn Armstrong, Paul Baine, John Montgomery, David McNeill, Harold Gamble, Michael Bain

Research output: Contribution to journal › Article

@article{b3fd046957b74f7f9a77b5fc4f180c11,

title = "Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI",

author = "Mervyn Armstrong and Paul Baine and John Montgomery and David McNeill and Harold Gamble and Michael Bain",

year = "2010",

month = "4",

language = "English",

volume = "28(1)",

pages = "331--341",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

}