Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI

Mervyn Armstrong, Paul Baine, John Montgomery, David McNeill, Harold Gamble, Michael Bain

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)331-341
Number of pages11
JournalECS Transactions
Volume28(1)
Publication statusPublished - Apr 2010

Cite this