Dopant transport in tungsten silicide layers for application in SOI technology

S. Liao, Michael Bain, Paul Baine, John Montgomery, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages0-0
Number of pages1
Publication statusPublished - Dec 2009
EventMaterials Ireland Conference - Cork, Ireland
Duration: 01 Dec 200901 Dec 2009

Conference

ConferenceMaterials Ireland Conference
CountryIreland
CityCork
Period01/12/200901/12/2009

Cite this

Liao, S., Bain, M., Baine, P., Montgomery, J., McNeill, D., Armstrong, M., & Gamble, H. (2009). Dopant transport in tungsten silicide layers for application in SOI technology. 0-0. Paper presented at Materials Ireland Conference, Cork, Ireland.