Dopant transport in tungsten silicide layers for application in SOI technology

S. Liao, Michael Bain, Paul Baine, John Montgomery, David McNeill, Mervyn Armstrong, Harold Gamble

Research output: Contribution to conference › Paper

Original language	English
Pages	0-0
Number of pages	1
Publication status	Published - Dec 2009
Event	Materials Ireland Conference - Cork, Ireland Duration: 01 Dec 2009 → 01 Dec 2009

Conference	Materials Ireland Conference
Country/Territory	Ireland
City	Cork
Period	01/12/2009 → 01/12/2009

Cite this

@conference{64993062df714896b173bc5d53d10255,

title = "Dopant transport in tungsten silicide layers for application in SOI technology",

author = "S. Liao and Michael Bain and Paul Baine and John Montgomery and David McNeill and Mervyn Armstrong and Harold Gamble",

year = "2009",

month = dec,

language = "English",

pages = "0--0",

note = "Materials Ireland Conference ; Conference date: 01-12-2009 Through 01-12-2009",

}