Effect of deposition temperature on the formation of CoSi2 through the rapid thermal annealing of CVD cobalt

Mervyn Armstrong, Michael Bain, Harold Gamble

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	336-342
Number of pages	7
Journal	Microelectronic Engineering
Volume	76(1-4)
Issue number	1-4
Publication status	Published - Oct 2004

ASJC Scopus subject areas

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title = "Effect of deposition temperature on the formation of CoSi2 through the rapid thermal annealing of CVD cobalt",

author = "Mervyn Armstrong and Michael Bain and Harold Gamble",

year = "2004",

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AU - Armstrong, Mervyn

AU - Bain, Michael

AU - Gamble, Harold

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