Effect of material properties on stress-induced defect generation in trenched SOI

W.A. Nevin, K. Somasundram, S. Blackstone, S. Magee, Anthony Paxton

Research output: Contribution to conferencePaper

Original languageEnglish
Pages524-531
Number of pages8
Publication statusPublished - Oct 2000
Event6th Symposium on High Purity Silicon held at the 198th Meeting of the Electrochemical-Society - Phoenix Arizona, United States
Duration: 01 Oct 200001 Oct 2000

Conference

Conference6th Symposium on High Purity Silicon held at the 198th Meeting of the Electrochemical-Society
CountryUnited States
CityPhoenix Arizona
Period01/10/200001/10/2000

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