Effect of nitridation on Al/HfO2/Ge MIS capacitors

B.J. Kailath, Sekhar Bhattacharya, A. DasGupta, N. DasGupta, David McNeill, Harold Gamble

Research output: Contribution to conferencePaper

Original languageEnglish
Pages194-197
Number of pages4
Publication statusPublished - Dec 2007
EventProceedings of 14th International Workshop on the Physics of Semiconductor Devices - Mumbai, India
Duration: 01 Dec 200701 Dec 2007

Conference

ConferenceProceedings of 14th International Workshop on the Physics of Semiconductor Devices
CountryIndia
CityMumbai
Period01/12/200701/12/2007

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